A Time-of-Flight (ToF) estimation algorithm for ranging using Silicon-On-Nothing pMUTs

This work presents a novel ToF estimation algorithm using Silicon-on-Nothing (SoN) ScAlN pMUTs based on a unique two-step matched filter with a template signal that was extracted independently from the measured data. This work reports, for the first time, the application of the proposed algorithm fo...

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Bibliographic Details
Published in2022 IEEE International Ultrasonics Symposium (IUS) pp. 1 - 4
Main Authors Sarafianou, Mantalena, Goh, Duan Jian, Wai Choong, David Sze
Format Conference Proceeding
LanguageEnglish
Published IEEE 10.10.2022
Subjects
Biomedical measurement
Estimation
Sensors
Signal processing algorithms
Temperature distribution
Temperature measurement
Temperature sensors
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Summary:This work presents a novel ToF estimation algorithm using Silicon-on-Nothing (SoN) ScAlN pMUTs based on a unique two-step matched filter with a template signal that was extracted independently from the measured data. This work reports, for the first time, the application of the proposed algorithm for environmental temperature sensing using a pair of pMUTs. Preliminary results reported a mean accuracy of 98.5% for a sensing temperature range of 30 to 126° C, thus, paving the way towards the algorithm's use for temperature sensing using pMUTs. The proposed temperature sensing setup could be extended to measure temperatures as high as 250° C (given the device heat tolerance) and modified for non-contact surface temperature sensing for biomedical applications (i.e. tissue temperature sensing for therapy monitoring).
ISSN:1948-5727
DOI:10.1109/IUS54386.2022.9957846