SiOx Tunneling Diode Arrays With Uniform Electron Emission
Uniform electron emission (EE) from on-chip micro-emitter arrays based on SiO x tunneling diodes (STDs) in electroformed SiO x is reported. EE from STDs is found to be accompanied with visible light emission, which enables us to resolve the spatial distribution of EE from the micro-emitter arrays an...
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Published in | IEEE electron device letters Vol. 43; no. 8; pp. 1339 - 1342 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
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New York
IEEE
01.08.2022
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
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Abstract | Uniform electron emission (EE) from on-chip micro-emitter arrays based on SiO x tunneling diodes (STDs) in electroformed SiO x is reported. EE from STDs is found to be accompanied with visible light emission, which enables us to resolve the spatial distribution of EE from the micro-emitter arrays and emitter-to-emitter uniformity at the microscale resolution via optical imaging. Up to 99% micro-emitters in a 15 <inline-formula> <tex-math notation="LaTeX">\times15 </tex-math></inline-formula> array is observed to work simultaneously with good emitter-to-emitter uniformity, showing an emission current of 0.56 mA and an emission density of 626 mA/cm 2 . The good uniformity is attributed to the insensitivity of EE from STDs to the microfabricated structures of micro-emitters. |
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AbstractList | Uniform electron emission (EE) from on-chip micro-emitter arrays based on SiOx tunneling diodes (STDs) in electroformed SiOx is reported. EE from STDs is found to be accompanied with visible light emission, which enables us to resolve the spatial distribution of EE from the micro-emitter arrays and emitter-to-emitter uniformity at the microscale resolution via optical imaging. Up to 99% micro-emitters in a 15 [Formula Omitted] array is observed to work simultaneously with good emitter-to-emitter uniformity, showing an emission current of 0.56 mA and an emission density of 626 mA/cm2. The good uniformity is attributed to the insensitivity of EE from STDs to the microfabricated structures of micro-emitters. Uniform electron emission (EE) from on-chip micro-emitter arrays based on SiO x tunneling diodes (STDs) in electroformed SiO x is reported. EE from STDs is found to be accompanied with visible light emission, which enables us to resolve the spatial distribution of EE from the micro-emitter arrays and emitter-to-emitter uniformity at the microscale resolution via optical imaging. Up to 99% micro-emitters in a 15 <inline-formula> <tex-math notation="LaTeX">\times15 </tex-math></inline-formula> array is observed to work simultaneously with good emitter-to-emitter uniformity, showing an emission current of 0.56 mA and an emission density of 626 mA/cm 2 . The good uniformity is attributed to the insensitivity of EE from STDs to the microfabricated structures of micro-emitters. |
Author | Zhan, Fangyuan Li, Zhiwei Yu, Panpan Wang, Bingjie He, Yidan Wei, Xianlong Yang, Wei |
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Snippet | Uniform electron emission (EE) from on-chip micro-emitter arrays based on SiO x tunneling diodes (STDs) in electroformed SiO x is reported. EE from STDs is... Uniform electron emission (EE) from on-chip micro-emitter arrays based on SiOx tunneling diodes (STDs) in electroformed SiOx is reported. EE from STDs is found... |
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SubjectTerms | Arrays Electroforming Electron emission Emitters Graphene Light emission micro-emitter array Nanoscale devices On-chip electron source Optical arrays Optical imaging Silicon silicon oxide Spatial distribution Stimulated emission Tunnel diodes Tunneling tunneling diode uniform emission |
Title | SiOx Tunneling Diode Arrays With Uniform Electron Emission |
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