Autofocusing-based visual servoing: Application to MEMS micromanipulation

In MEMS microassembly areas, different methods of automatic focusing are presented in the literature. All these methods have a common point. Thus, the current autofocusing methods for microscopes need to perform a scanning on all the vertical axis of the microscope in order to find the peak correspo...

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Bibliographic Details
Published in2010 International Symposium on Optomechatronic Technologies pp. 1 - 6
Main Authors Duceux, G, Tamadazte, B, Piat, N Le-Fort, Dembélé, S, Marchand, E, Fortier, G
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2010
Subjects
Cost function
Micromechanical devices
Microscopy
Optical imaging
Optical microscopy
Optical sensors
Visual servoing
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Summary:In MEMS microassembly areas, different methods of automatic focusing are presented in the literature. All these methods have a common point. Thus, the current autofocusing methods for microscopes need to perform a scanning on all the vertical axis of the microscope in order to find the peak corresponding to the focus (sharpen image). Those methods are time consuming. Therefore, this paper presents an original method of autofocusing based on a velocity control approach which is developed and validated on real experiments.
ISBN:9781424476848
1424476844
DOI:10.1109/ISOT.2010.5687387