High pressure CVD inside microstructured optical fibres
We report the fabrication of semiconductor structures within holey fibres via a pressure driven microfluidic chemical vapour deposition process, demonstrating templated growth of crystalline Group IV semiconductor structures and devices in extreme aspect ratio geometries.
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Published in | 2006 European Conference on Optical Communications pp. 1 - 2 |
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Main Authors | , , , , , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.09.2006
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Subjects | |
Online Access | Get full text |
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Summary: | We report the fabrication of semiconductor structures within holey fibres via a pressure driven microfluidic chemical vapour deposition process, demonstrating templated growth of crystalline Group IV semiconductor structures and devices in extreme aspect ratio geometries. |
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ISSN: | 1550-381X |
DOI: | 10.1109/ECOC.2006.4801105 |