Spectral characterisation of aperiodic normal-incidence Sb/B4C multilayer mirrors for the λ < 124 Å range

Three broadband aperiodic Sb/B4C multilayer mirrors were synthesised for the purposes of soft X-ray optics and spectroscopy in the wavelength range beyond the L-edge of Si (λ < 124 Å), and their reflection spectra were measured. The multilayer structures were optimised for maximum uniform reflect...

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Published inQuantum electronics (Woodbury, N.Y.) Vol. 48; no. 3; pp. 189 - 196
Main Authors Vishnyakov, E.A., Kopylets, I.A., Kondratenko, V.V., Kolesnikov, A.O., Pirozhkov, A.S., Ragozin, E.N., Shatokhin, A.N.
Format Journal Article
LanguageEnglish
Published Bristol Kvantovaya Elektronika, Turpion Ltd and IOP Publishing 01.03.2018
IOP Publishing
Subjects
Antimony
aperiodic structures
Boron carbide
Broadband
multilayer mirrors
Multilayers
normal radiation incidence
Plasma radiation
Reflection
Sb/B
Soft x rays
soft X-ray range
Spatial resolution
Spectra
Spectrum analysis
X ray optics
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Summary:Three broadband aperiodic Sb/B4C multilayer mirrors were synthesised for the purposes of soft X-ray optics and spectroscopy in the wavelength range beyond the L-edge of Si (λ < 124 Å), and their reflection spectra were measured. The multilayer structures were optimised for maximum uniform reflectivity in the ranges 100 - 120 Å, 95 - 105 Å and 90 - 100 Å. The reflection spectra were recorded using a laboratory laser-plasma radiation source and an electronic detector with a 2D spatial resolution (a CCD matrix with 13 × 13 μm sized pixels). The experimental spectra are compared with theoretical calculations. The effect of lower antimony and B4C layer densities on the reflection spectra is discussed.
ISSN:1063-7818
1468-4799
DOI:10.1070/QEL16574