Ionic Liquid-assisted Cavitation for Ultrafast Laser Micromachining

We study the effects of cavitation-assisted ultrafast laser micromachining under ionic liquids, rather than traditional water immersion. Ionic liquids may serve to localize damage more precisely because their low vapor pressures inhibit cavitation.

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Bibliographic Details
Published in2023 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2
Main Authors Canfield, Brian K., Allman, John N., Terekhov, Alexander, Moeller, Trevor M., Costa, Lino
Format Conference Proceeding
LanguageEnglish
Published OSA 01.05.2023
Subjects
Electo-optic effects
Liquids
Micromachining
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Summary:We study the effects of cavitation-assisted ultrafast laser micromachining under ionic liquids, rather than traditional water immersion. Ionic liquids may serve to localize damage more precisely because their low vapor pressures inhibit cavitation.
DOI:10.1364/CLEO_AT.2023.STh1N.3