Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath

A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the charact...

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Bibliographic Details
Published in2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) pp. 1 - 4
Main Authors Rabih, A.A.S., Md Khir, M.H., Ahmed, A.Y., Ahmed, M.G.A., Dennis, J.O.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2015
Subjects
Diabetes
Electrical resistance measurement
exhaled breath
Heating
MEMS Device
Piezoresistive devices
Resistance
TCR
Temperature measurement
Temperature sensors
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Summary:A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the characterization of polysilicon piezoresistors, heater and temperature sensor embedded in the device. The measured resistances were found to be close to the modelled values within 1.1-6.8% error. Temperature coefficient of resistance (TCR) of the temperature sensor in a range of 25-100°C was found. TCR increases linearly with increasing the temperature and decreases linearly with decreasing the temperature. It was found to be 0.0033/°C for the increasing temperature and 0.0034/°C for the decreasing temperature, compared to 0.0038/°C reported in the literature, with an error of 13% and 10.5%, respectively.
DOI:10.1109/RSM.2015.7354966