Contaminant failure analysis: A particle library and its search engine

• Published in: 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits pp. 219 - 222
• Main Authors: Mei-Ju Lu, Ying-Ta Chiu, Ping-Feng Yang
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.06.2015
• Subjects: Assembly; Cameras; Failure analysis; Lenses; Libraries; Search engines
• ISSN: 1946-1542; 1946-1550
• DOI: 10.1109/IPFA.2015.7224375

We demonstrate a procedure of contaminant-related failure analysis, which identifies where the contaminant sources are by looking for the matched characteristics in a contaminant library. As a result, an expandable contaminant library with over a half thousand of samples is created along with an indexing searching engine to largely reduce the time-consuming identification. With this system, we can locate the contaminant sources and further remove the root causes and improve the process ability. We demonstrate a procedure of contaminant-related failure analysis, which identifies where the contaminant sources are by looking for the matched characteristics in a contaminant library. As a result, an expandable contaminant library with half thousands of samples is created along with an indexing search engine, which could largely reduce the time-consuming identification.