MIM serie capacitor model for MMIC design application

A new proposed Metal-Insulator-Metal (MIM) series capacitor model for Monolithic Microwave Integrated Circuit is presented. The MIM series capacitor model covers the frequency range up to 40 GHz for millimeter-wave circuit design application. The parasitic elements of model are extracted by paramete...

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Bibliographic Details
Published in2013 International Workshop on Microwave and Millimeter Wave Circuits and System Technology pp. 475 - 478
Main Authors Tiwat, Pongthavornkamol, Yuan Tingting, Liu Guoguo, Chen Xiaojuan, Liu Xinyu
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2013
Subjects
Atmospheric modeling
Capacitors
Dielectric measurement
Feeds
MIM Capacitor
MMIC
PECVD
RF-Power amplifiers
Silicon carbide
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Summary:A new proposed Metal-Insulator-Metal (MIM) series capacitor model for Monolithic Microwave Integrated Circuit is presented. The MIM series capacitor model covers the frequency range up to 40 GHz for millimeter-wave circuit design application. The parasitic elements of model are extracted by parameters fitting optimization between the measured S-parameters and model simulated result. The relationship between the optimized parasitic element values and the dimension data of capacitor structure can be expressed.
DOI:10.1109/MMWCST.2013.6814555