Functional MOEMS packaging with optical position feedback

This paper reports a novel integration concept of an optical position feedback and driver unit for MOEMS scanner mirrors. The optical feedback scheme is based on a quadrant diode with a central hole. A compact PCB-based module was realized, which combines all necessary electrical, optical and mechan...

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Bibliographic Details
Published in2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) pp. 220 - 223
Main Authors Tortschanoff, A., Baumgart, M., Lenzhofer, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2015
Subjects
Adaptive optics
Functional packaging
Integrated optics
MEMS housing
Mirrors
Module
MOEMS
Optical design
Optical feedback
Optical reflection
Optical sensors
PCB
position feedback
scanner
SiP
System-in-Package
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Summary:This paper reports a novel integration concept of an optical position feedback and driver unit for MOEMS scanner mirrors. The optical feedback scheme is based on a quadrant diode with a central hole. A compact PCB-based module was realized, which combines all necessary electrical, optical and mechanical aspects using existing manufacturing technologies. These modules provide a functional MOEMS packaging, which can be realized within short time at a minimum cost.
ISSN:2159-547X
DOI:10.1109/TRANSDUCERS.2015.7180901