Circuit considerations and design for MEMS capacitance measurements

Modern CMOS integrated technologies integrate a variety of complex multi-physics components which contribute a growing number of challenges in the circuit design. This paper is focused on the description of the requirements and technical aspects which should be considered for successful circuit desi...

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Bibliographic Details
Published in2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) pp. 1 - 4
Main Authors Andrade-Miceli, D., Giounalis, P., Gorreta, S., Pons-Nin, J., Dominguez-Pumar, M., Blokhina, E.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2016
Subjects
Application specific integrated circuits
ASIC Design
Capacitance
Field programmable gate arrays
MEMS dielectric charging
Micromechanical devices
RF MEMS
Varactors
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Summary:Modern CMOS integrated technologies integrate a variety of complex multi-physics components which contribute a growing number of challenges in the circuit design. This paper is focused on the description of the requirements and technical aspects which should be considered for successful circuit design involving capacitive MEMS. To illustrate the process, the design of an input stage for a MEMS dielectric charge bipolar control method is presented.
DOI:10.1109/PRIME.2016.7519540