A 83dB SNDR low power readout ASIC for piezoresistive nanogauge based gyroscopes

We report a 3-channel ASIC for M&NEMS coriolis vibratory gyroscopes. Key element of each analog frontend (AFE) channel is a closed-loop interface amplifier with current reuse for the biasing of the piezoresistive nanogauge sensor detection. The outputs of the 3-channels are multiplexed to a sing...

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Bibliographic Details
Published in2016 IEEE International Symposium on Circuits and Systems (ISCAS) pp. 2238 - 2241
Main Authors Nikas, A., Leman, O., Zhou, H., Lagos, J. L., Vinchhi, B. J., Hauer, J.
Format Conference Proceeding Journal Article
LanguageEnglish
Published IEEE 01.05.2016
Subjects
analog-front-end
Band-pass filters
Channels
CMOS
Deltas
Demodulation
Electric potential
Finite impulse response filters
Frequency measurement
gyroscope
Gyroscopes
MEMS and M&NEMS
Modulators
Multiplexing
Nanostructure
piezoresistive
Power demand
Resonator filters
silicon nanowire
Voltage
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Summary:We report a 3-channel ASIC for M&NEMS coriolis vibratory gyroscopes. Key element of each analog frontend (AFE) channel is a closed-loop interface amplifier with current reuse for the biasing of the piezoresistive nanogauge sensor detection. The outputs of the 3-channels are multiplexed to a single band-pass sigma delta modulator for on-chip analog to digital conversion. The fabricated ASIC achieves per channel a SNDR of 73dB and 83dB for a 400Hz and 50Hz bandwidth respectively. A single AFE consumes 672μW at a supply voltage of 2.4V and occupies an area of 0.3mm 2 .
Bibliography:ObjectType-Article-2
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SourceType-Conference Papers & Proceedings-2
ISSN:2379-447X
DOI:10.1109/ISCAS.2016.7539028