Screen-printed free-standing piezoelectric devices using low temperature process

This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers an...

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Published in2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) pp. 1 - 4
Main Authors Jamel, Nursabirah, Almusallam, Ahmed, Dibin Zhu, Torah, Russel, Kai Yang, Tudor, John, Beeby, Steve
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.04.2015
Subjects
cantilever
Fabrication
Fabrics
free-standing
low temperature process
Measurement by laser beam
piezoelectric
Printing
sacrificial technology
screen-printing
Substrates
Temperature sensors
Voltage measurement
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Abstract This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers and encastre beam structures have been fabricated simultaneously on a single substrate, demonstrating the feasibility of mass production.
AbstractList This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers and encastre beam structures have been fabricated simultaneously on a single substrate, demonstrating the feasibility of mass production.
Author Torah, Russel
Kai Yang
Beeby, Steve
Almusallam, Ahmed
Jamel, Nursabirah
Tudor, John
Dibin Zhu
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  givenname: Ahmed
  surname: Almusallam
  fullname: Almusallam, Ahmed
  organization: Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
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  surname: Dibin Zhu
  fullname: Dibin Zhu
  organization: Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
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  organization: Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
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  surname: Kai Yang
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  organization: Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
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  organization: Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
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  givenname: Steve
  surname: Beeby
  fullname: Beeby, Steve
  organization: Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
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Snippet This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon...
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SubjectTerms cantilever
Fabrication
Fabrics
free-standing
low temperature process
Measurement by laser beam
piezoelectric
Printing
sacrificial technology
screen-printing
Substrates
Temperature sensors
Voltage measurement
Title Screen-printed free-standing piezoelectric devices using low temperature process
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