Screen-printed free-standing piezoelectric devices using low temperature process

This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers an...

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Bibliographic Details
Published in2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) pp. 1 - 4
Main Authors Jamel, Nursabirah, Almusallam, Ahmed, Dibin Zhu, Torah, Russel, Kai Yang, Tudor, John, Beeby, Steve
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.04.2015
Subjects
cantilever
Fabrication
Fabrics
free-standing
low temperature process
Measurement by laser beam
piezoelectric
Printing
sacrificial technology
screen-printing
Substrates
Temperature sensors
Voltage measurement
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Summary:This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers and encastre beam structures have been fabricated simultaneously on a single substrate, demonstrating the feasibility of mass production.
ISBN:9781479986279
1479986275
DOI:10.1109/DTIP.2015.7160968