A thin film pressure sensor with double sensitive units

The paper expresses two strategies for improving the sensitivity of capacitive pressure sensor. Microstructuring of dielectric elastomer surface can significantly increase capacitance response of the sensor due to raising permittivity and elasticity of dielectric. For the thin sensor, multi sensor u...

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Bibliographic Details
Published in2015 IEEE International Conference on Information and Automation pp. 2947 - 2948
Main Authors Hongqing Pan, Guangyu Hu, Pingguo Cao, Yubing Wang, Yunjian Ge, Feng Shuang
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2015
Subjects
Capacitance
Capacitors
Indium tin oxide
Microstructured film
Pressure sensor
Pressure sensors
Sensitivity
Tactile sensor
Thin film capacitor
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Summary:The paper expresses two strategies for improving the sensitivity of capacitive pressure sensor. Microstructuring of dielectric elastomer surface can significantly increase capacitance response of the sensor due to raising permittivity and elasticity of dielectric. For the thin sensor, multi sensor units using stacked structure have multiplied effect in signal output.
DOI:10.1109/ICInfA.2015.7279792