Influence of induced stress on AlN-solidly mounted resonators

The frequency variation of solidly mounted resonators made with AlN thin films operating in longitudinal and shear acoustic modes with induced in plane mechanical strain is presented. The induced deformation range is in the hundreds of microstrains and the frequency variations in the hundreds of kHz...

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Bibliographic Details
Published in2016 European Frequency and Time Forum (EFTF) pp. 1 - 4
Main Authors Delicado, A., Clement, M., Olivares, J., Mirea, T., Diaz-Duran, B., Iborra, E.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.04.2016
Subjects
AlN resonator
Aluminum nitride
Couplings
frequency variation
III-V semiconductor materials
mechanical strain
Resonant frequency
Silicon
Strain
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Summary:The frequency variation of solidly mounted resonators made with AlN thin films operating in longitudinal and shear acoustic modes with induced in plane mechanical strain is presented. The induced deformation range is in the hundreds of microstrains and the frequency variations in the hundreds of kHz, giving coefficients of resonant frequency with deformation in the order of 56% per unit strain. The influence on this parameter of the resonant mode, coupling factor and frequency is analyzed.
DOI:10.1109/EFTF.2016.7477834