Low-Phase-Error Silicon 90° Optical Hybrid with Large Fabrication Tolerance
A novel silicon 90° optical hybrid with large fabrication tolerance for the phase error is demonstrated. A high yield of 99.94% for| phase error| < 5° in the wavelength range of 1.525 - 1.57µm is achieved by using two fabricated wafers.
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Published in | 2023 IEEE Silicon Photonics Conference (SiPhotonics) pp. 1 - 2 |
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Main Authors | , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A novel silicon 90° optical hybrid with large fabrication tolerance for the phase error is demonstrated. A high yield of 99.94% for| phase error| < 5° in the wavelength range of 1.525 - 1.57µm is achieved by using two fabricated wafers. |
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ISSN: | 1949-209X |
DOI: | 10.1109/SiPhotonics55903.2023.10141928 |