Low-Phase-Error Silicon 90° Optical Hybrid with Large Fabrication Tolerance

A novel silicon 90° optical hybrid with large fabrication tolerance for the phase error is demonstrated. A high yield of 99.94% for| phase error| < 5° in the wavelength range of 1.525 - 1.57µm is achieved by using two fabricated wafers.

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Bibliographic Details
Published in2023 IEEE Silicon Photonics Conference (SiPhotonics) pp. 1 - 2
Main Authors Oka, Akira, Wang, Jianping, Yoshida, Yoshihiko, Uetake, Ayahito, Ishii, Akira, Akiyama, Suguru
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.04.2023
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Summary:A novel silicon 90° optical hybrid with large fabrication tolerance for the phase error is demonstrated. A high yield of 99.94% for| phase error| < 5° in the wavelength range of 1.525 - 1.57µm is achieved by using two fabricated wafers.
ISSN:1949-209X
DOI:10.1109/SiPhotonics55903.2023.10141928