Comparison of Different Shapes MEMS based Piezo Electric Pressure Sensor for Smart Devices

This paper deals with design and comparison of different shaped MEMS pressure sensors. There are many components to note down the deflection of pressure but this research work has selected to design a piezoelectric pressure sensor in COMSOL Multi-physics software. MEMS pressure sensor is used as the...

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Bibliographic Details
Published in2023 5th International Conference on Smart Systems and Inventive Technology (ICSSIT) pp. 1 - 5
Main Authors Nath, Srigitha.S., Lingaraja, D, Aravind, P, Thangavel, P, Arun Kumar, P, Ram, G.Dinesh
Format Conference Proceeding
LanguageEnglish
Published IEEE 23.01.2023
Subjects
Circle
COMSOL Multi-physics
Deflection
Industries
Micromechanical devices
Piezoelectric sensor
Pressure sensor
Pressure sensors
Shape
Smart devices
Software
Software reliability
Square
Triangle
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Summary:This paper deals with design and comparison of different shaped MEMS pressure sensors. There are many components to note down the deflection of pressure but this research work has selected to design a piezoelectric pressure sensor in COMSOL Multi-physics software. MEMS pressure sensor is used as they are lightweight by delivering enhanced performance and reliability. The piezoelectric sensor is selected over piezoresistive sensor since it has the high threshold ratio. The piezoelectric sensor is designed in three different shapes such as square, circle and Octagon to find which is having high performance and high deflection range. This study has compared all the three shapes and the output is noted for obtaining the best results. After testing it in COMSOL, the designed piezoelectric can be applied in many fields like biomedical, automobile and smartphones.
ISSN:2832-3017
DOI:10.1109/ICSSIT55814.2023.10061138