Performance Analysis and Numerical Modelling of Thinfilm sensor

Volatile Organic Compounds (VOC) sensing has prominence in the current environmental conditions. As we are using plenty of carbon-based compounds. The VOCs released like ethylene, Methylene, benzene, toluene, etc compounds released during the usage of perfumes paints, varnishes are having adverse ef...

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Bibliographic Details
Published in2023 International Conference for Advancement in Technology (ICONAT) pp. 1 - 4
Main Authors Jayadeepthi, K, Raju, S Srinivasulu, Sravani, Ch, Kishore, K Nanda, Nadh, L Bhargav
Format Conference Proceeding
LanguageEnglish
Published IEEE 24.01.2023
Subjects
Biological system modeling
COMSOL
FEM
MEMS
Sensitivity
Structural engineering
Thin film sensors
Thinfilm
Torque
Vibrations
VOC
Volatile organic compounds
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Summary:Volatile Organic Compounds (VOC) sensing has prominence in the current environmental conditions. As we are using plenty of carbon-based compounds. The VOCs released like ethylene, Methylene, benzene, toluene, etc compounds released during the usage of perfumes paints, varnishes are having adverse effects on human health. A thinfilm sensor is designed for development in sensing these VOCs. In the present study, we model, simulate, and characterize a bio sensor using COMSOL simulation tool. The simulation findings demonstrated that the new cantilever structure can create greater stress than the triangular and rectangular structures while also improving the stress distribution. COMSOL Multiphysics is used to model the proposed construction. The analytical study of structural properties of the thinfilm sensor were studied. It was observed that the resistance variations due to stress are affecting the sensitivity of sensor. The effect of thickness variations of the thinfilm sensor in sensing VOC using Al as the sensing element is examined. Subsequently, the structural parameters of the sensor are optimized, which extensively progressed and improved sensitivity of the material. The fabricated thin films can be used for many applications like chemical sensor, biosensor, optical sensor etc.
DOI:10.1109/ICONAT57137.2023.10080091