Optimizing high concentration Scandium Aluminum Nitride films

Adding Scandium (Sc) to the aluminum nitride (AlN) is widely used to significantly increase coupling coefficient in Piezo-MEMS devices [1] , [2] , [3] and [4] . Figure 1 shows relationship between Coupling coefficient and Sc content in AlN film.

Saved in:
Bibliographic Details
Published in2023 IEEE International Ultrasonics Symposium (IUS) pp. 1 - 3
Main Authors Mishin, Sergey, Oshmyansky, Yury
Format Conference Proceeding
LanguageEnglish
Published IEEE 03.09.2023
Subjects
Acoustics
aluminum nitride
coupling coefficient
Couplings
Electrodes
film stress
High-voltage techniques
III-V semiconductor materials
Ions
Scandium
Online AccessGet full text

Cover

More Information
Summary:Adding Scandium (Sc) to the aluminum nitride (AlN) is widely used to significantly increase coupling coefficient in Piezo-MEMS devices [1] , [2] , [3] and [4] . Figure 1 shows relationship between Coupling coefficient and Sc content in AlN film.
ISSN:1948-5727
DOI:10.1109/IUS51837.2023.10308061