Inscription and Characterization of Transversely Written Waveguides in Silicon with Picosecond Laser Pulses

The possibility to permanently modify transparent materials and inscribe waveguiding structures with ultrashort laser pulses is well established for dielectrics such as glasses. Such a technique discloses a versatile set of applications, ranging from telecommunications to photonic quantum circuits....

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Published in2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) p. 1
Main Authors Blothe, Markus, Chambonneau, Maxime, Alberucci, Alessandro, Alasgarzade, Namig, Nolte, Stefan
Format Conference Proceeding
LanguageEnglish
Published IEEE 26.06.2023
Subjects
Glass
Industries
Microelectronics
Silicon
Telecommunications
Three-dimensional displays
Waveguide lasers
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Summary:The possibility to permanently modify transparent materials and inscribe waveguiding structures with ultrashort laser pulses is well established for dielectrics such as glasses. Such a technique discloses a versatile set of applications, ranging from telecommunications to photonic quantum circuits. Attempts to transfer this 3D ultrafast inscription technique to the most important material in the microelectronics industry, silicon, failed so far for a transverse inscription strategy.
ISSN:2833-1052
DOI:10.1109/CLEO/Europe-EQEC57999.2023.10232608