Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems

• Published in: 2023 IEEE Conference on Control Technology and Applications (CCTA) pp. 798 - 803
• Main Authors: Xu, Duo, Popescu, Mihai-Serban, Lazar, Mircea
• Format: Conference Proceeding
• Language: English
• Published: IEEE 16.08.2023
• Subjects: Benchmark testing; Control systems; Data-driven control; Feedforward systems; High-precision power amplifiers; Lithography; Motion control; Noise measurement; Power amplifiers; Power measurement; Virtual reference feedback tuning

Motivated by the increasing requirements in positioning precision for lithography applications, this paper analyzes how the position error in a high-precision motion system is affected by the response of the controlled power amplifier that drives the motor. Based on the analysis, guidelines for desi...