Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems

Motivated by the increasing requirements in positioning precision for lithography applications, this paper analyzes how the position error in a high-precision motion system is affected by the response of the controlled power amplifier that drives the motor. Based on the analysis, guidelines for desi...

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Bibliographic Details
Published in2023 IEEE Conference on Control Technology and Applications (CCTA) pp. 798 - 803
Main Authors Xu, Duo, Popescu, Mihai-Serban, Lazar, Mircea
Format Conference Proceeding
LanguageEnglish
Published IEEE 16.08.2023
Subjects
Benchmark testing
Control systems
Data-driven control
Feedforward systems
High-precision power amplifiers
Lithography
Motion control
Noise measurement
Power amplifiers
Power measurement
Virtual reference feedback tuning
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Summary:Motivated by the increasing requirements in positioning precision for lithography applications, this paper analyzes how the position error in a high-precision motion system is affected by the response of the controlled power amplifier that drives the motor. Based on the analysis, guidelines for designing a reference model in continuous or discrete time that satisfies certain requirements that would decrease the overall position error are presented. Then, a data-driven control method, namely Virtual Reference Feedback Tuning (VRFT), is employed to directly synthesize both feedback and feedforward controllers based on the designed reference model. The position error of the motion system with the data-driven controlled power amplifier is compared to the case when classical industrial controllers are employed in the control of the amplifier. If adequate reference models are designed, the VRFT-controlled power amplifier can significantly decrease the position error such that it is close to the ideal position error. All of the presented results are based on simulations.
ISSN:2768-0770
DOI:10.1109/CCTA54093.2023.10252583