Dicing Blade Characterization Using Nano-indentation

In this paper, the widely used nano-indentation technique is employed to characterize the mechanical properties of dicing blade. The dicing blade is a heterogeneous composite material consisting of diamond particles embedded in Ni-reinforced resin matrix. Different peak loads were applied to determi...

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Bibliographic Details
Published in2021 IEEE 23rd Electronics Packaging Technology Conference (EPTC) pp. 144 - 147
Main Authors Zhu, Xintong, Rajoo, Ranjan, Nistala, Ramesh Rao, Chan, Kai Chong, Mo, Zhi Qiang
Format Conference Proceeding
LanguageEnglish
Published IEEE 07.12.2021
Subjects
Atmospheric measurements
Blades
Diamond
Particle measurements
Shape
Shape measurement
Surface morphology
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Summary:In this paper, the widely used nano-indentation technique is employed to characterize the mechanical properties of dicing blade. The dicing blade is a heterogeneous composite material consisting of diamond particles embedded in Ni-reinforced resin matrix. Different peak loads were applied to determine an ideal load (sufficient to overcome the surface effects but at the same time avoid the substrate effects) which can be used to study the mechanical response (reduced modulus) of the blade as a function of dicing distance and blade wear rate. It is shown that a correlation exists between the reduced modulus and dicing distance.
DOI:10.1109/EPTC53413.2021.9663879