Q-band micro-patch antennas implemented on a high resistivity silicon substrate using the surface micromachining technology

• Published in: 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535) Vol. 2; pp. 1189 - 1192 Vol.2
• Main Authors: HA, Man-Lyun, CHO, Yong-Heui, PYO, Cheol-Sig, KWON, Young-Se
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2004
• Subjects: Antenna feeds; Antennas; Applied sciences; Bandwidth; Circuit properties; Conductivity; Design. Technologies. Operation analysis. Testing; Electric, optical and optoelectronic circuits; Electronics; Exact sciences and technology; Frequency; Integrated circuits; Microelectronic fabrication (materials and surfaces technology); Micromachining; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits; Parasitic capacitance; Patch antennas; Radiocommunications; Resists; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Shape measurement; Silicon; Telecommunications; Telecommunications and information theory; Spurious capacity; Micromachining; Printed antenna; Microwave; Rectangular shape; Q band; Implementation; Millimetric wave; Integrated antenna; Microelectronic fabrication; Microwave antenna; Capacitance; Miniaturization; Monolithic integrated circuit; High frequency; Photolithography; Photoresist
• ISBN: 0780383311; 9780780383319
• ISSN: 0149-645X; 2576-7216
• DOI: 10.1109/MWSYM.2004.1339199

Using the surface micromachining technology composed of thick photoresist patterning and Cu-metal plating process, Q-band micro-patch antennas were implemented on high resistivity silicon (HRS) substrate. Because the application frequency is sufficiently high, the monolithically integrated, miniaturized micro antennas find applications in many systems. 42-GHz micro-patch antennas were fed by the coupling from the micro-strip feeder under the patch part. Using the parasitic capacitance in the posts contacted with HRS substrate, the patch sizes were decreased with slight decreasing of the bandwidth of antennas. Implemented patch antennas have 3 or 4 posts and their size was decreased with the increasing post capacitance in the radiating edges. Implemented patch sizes were 2.12, 1.78, and 1.41-mm with rectangular shape and the measured bandwidth under -10 dB of S11 was about 6 GHz(/spl sim/15%) with center frequency of 41.5 GHz in the case of 2.12 mm patch length.