Microfabricated shear-sensitive tactile sensor for human-object interface studies

A silicon-based shear-force sensitive sensor is developed for the study of human-object interfaces. The sensor is designed based on the piezoresistive effect in silicon and fabricated using microfabrication technology. Detailed characterization of sensor prototypes is performed (linearity, R>0.98...

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Bibliographic Details
Published inProceedings of the First Joint BMES/EMBS Conference : serving humanity advancing technology, Oct. 13-16, 99, Atlanta, GA, USA Vol. 2; pp. 837 vol.2 - 837
Main Authors Lin Wang, Beebe, D.J.
Format Conference Proceeding Journal Article
LanguageEnglish
Published IEEE 1999
Subjects
Force measurement
Force sensors
Humans
Interfaces (materials)
Linearity
Prototypes
Sensor phenomena and characterization
Silicon
Skin
Tactile sensors
Testing
Ultrasonic variables measurement
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Summary:A silicon-based shear-force sensitive sensor is developed for the study of human-object interfaces. The sensor is designed based on the piezoresistive effect in silicon and fabricated using microfabrication technology. Detailed characterization of sensor prototypes is performed (linearity, R>0.98; repeatability, STD<8%). Shear sensing ability is demonstrated. Preliminary results of human subject tests are also described.
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ISBN:0780356748
9780780356740
9780780356757
0780356756
ISSN:1094-687X
0589-1019
DOI:10.1109/IEMBS.1999.803992