Online terahertz thickness determination of sub-wavelength layers at kilohertz measurement rates

We present an online layer-thickness measurement system capable of assessing multiple sub-wavelength layers at a data rate of 1.6 kHz. Combining an ultrafast terahertz time-domain spectroscopy engine based on electronically controlled optical sampling (ECOPS) with a highly efficient CPU-based evalua...

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Bibliographic Details
Published in2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) pp. 1 - 2
Main Authors Klier, J., Weber, S., Jonuscheit, J., Ellenberger, K.-S., Freymann, G. von, Molter, D., Vieweg, N., Dutzi, K., Deninger, A.
Format Conference Proceeding
LanguageEnglish
Published IEEE 29.08.2021
Subjects
Nonhomogeneous media
Optical variables measurement
Real-time systems
Spectroscopy
Terahertz materials
Time-domain analysis
Ultrafast optics
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Summary:We present an online layer-thickness measurement system capable of assessing multiple sub-wavelength layers at a data rate of 1.6 kHz. Combining an ultrafast terahertz time-domain spectroscopy engine based on electronically controlled optical sampling (ECOPS) with a highly efficient CPU-based evaluation algorithm, an industry-ready measurement system is realized. To evaluate the performance, we quantify the thickness of multilayer paint samples on aluminum substrates.
ISSN:2162-2035
DOI:10.1109/IRMMW-THz50926.2021.9567404