Analysis of Beam Collimation Data from Field-Emitter Arrays with Linear Planar Lens

Summary form only given. Discusses emission and beam collimation data from silicon field-emit,ter arrays with inrieperidently controlled planar lenses. The devices were fabricated by MCNC in two geometries: a row of 100 tips and two rows of emitters each with 100 tips.

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Bibliographic Details
Published inIEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science p. 254
Main Authors Tang, C.-M., Swyden, T.A.
Format Conference Proceeding
LanguageEnglish
Published United States IEEE 1996
Institute of Electrical and Electronics Engineers, Inc., Piscataway, NJ (United States)
Subjects
BEAM OPTICS
Charge coupled devices
Charge-coupled image sensors
Collimators
DATA ANALYSIS
ELECTRON BEAMS
ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
FIELD EMISSION
Focusing
Geometry
Laboratories
Lenses
MICROELECTRONICS
Scanning electron microscopy
SILICON
Voltage
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Summary:Summary form only given. Discusses emission and beam collimation data from silicon field-emit,ter arrays with inrieperidently controlled planar lenses. The devices were fabricated by MCNC in two geometries: a row of 100 tips and two rows of emitters each with 100 tips.
Bibliography:National Inst. of Standards and Technology, Gaithersburg, MD (United States)
CONF-960634-
Office of Naval Research, Washington, DC (United States)
ISBN:9780780333222
0780333225
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.1996.551492