Influence of N2 Flux on InN Film Deposition on Sapphire (0001) Substrates by ECR-PEMOCVD

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Bibliographic Details
Published inChinese physics letters Vol. 28; p. 028102
Main Authors Zhou, Zhi-Feng (志峰 周), Qin, Fu-Wen (福文 秦), Zang, Hai-Rong (海蓉 臧), Zhang, Dong (东张), Chen, Wei-Ji (伟绩 陈), Zhi, An-Bo (安博 支), Liu, Xing-Long (兴隆 刘), Yu, Bo (博于), Jiang, Xin (辛姜)
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.02.2011
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ISSN0256-307X
1741-3540
DOI10.1088/0256-307X/28/2/028102

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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/28/2/028102