Solidly Mounted Longitudinally Excited A1 Mode Resonator Based on Linbo3/Metal/SIO2/SIC

• Published in: IEEE ... Symposium on Mass Storage Systems and Technologies pp. 1173 - 1176
• Main Authors: Fang, Xiaoli, Wu, Jinbo, Zhang, Shibin, Zheng, Pengcheng, Ke, Xinjian, He, Juxing, Sun, Mijing, Ou, Xin
• Format: Conference Proceeding
• Language: English
• Published: IEEE 19.01.2025
• Subjects: 5G NR filter; A1 mode; bottom electrode; Electric potential; Electrodes; Filters; high-velocity support substrate (HS); longitudinally excited; Optimization; Resonance; Resonant frequency; Silicon carbide; Solidly mounted resonator (SMR); Substrates; Three-dimensional displays; Wireless fidelity
• ISSN: 2160-1968
• DOI: 10.1109/MEMS61431.2025.10918108

For the first time, this work presents a solidly mounted (SM) longitudinally excited first-order antisymmetric lamb wave (A1) mode resonator with high-velocity support substrate (HS) and floating bottom electrode. Based on the X-cut LiNbO 3 /metal/SiO 2 /SiC substrate, HS-type A1 mode resonators have potential in achieving large bandwidth due to the large piezoelectric coefficient of LiNbO 3 . The maximum phase velocity of A1 mode can reach close to 7000 m/s, which is approximately twice that of conventional SAW. Additionally, this structure is easier for fabrication compared to the existing A1-mode resonator based on Bragg reflector (BR). The fabricated HS-type A1 mode resonators exhibit resonance frequencies (f s ) near 5 GHz and electromechanical coupling coefficient \left({k_t^2}\right) between 10% and 16%. Through further optimization, the new type A1 mode resonator will be a promising solution for 5G New Radio (NR) and Wi-Fi 7 band filters.