Low-noise monolithic oscillator with an integrated three-dimensional inductor

A balanced silicon BiCMOS oscillator using self-assembled curled circular spring 3D inductor with peak Q of 40 reduces phase noise by 12.3dB at 100kHz offset compared to conventional planar spiral inductor approach. The addition of a 5/spl mu/m copper underlayer raises Q to 85.

Saved in:
Bibliographic Details
Published in2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC pp. 392 - 501 vol.1
Main Authors Van Schuylenbergh, K., Griffiths, B., Chua, C.L., Fork, D.K., Jeng-Ping Lu
Format Conference Proceeding
LanguageEnglish
Published IEEE 2003
Subjects
Active inductors
Atomic layer deposition
Circuit testing
Coils
Mobile communication
Q factor
Radio frequency
Springs
Substrates
Voltage-controlled oscillators
Online AccessGet full text

Cover

More Information
Summary:A balanced silicon BiCMOS oscillator using self-assembled curled circular spring 3D inductor with peak Q of 40 reduces phase noise by 12.3dB at 100kHz offset compared to conventional planar spiral inductor approach. The addition of a 5/spl mu/m copper underlayer raises Q to 85.
ISBN:9780780377073
0780377079
ISSN:0193-6530
2376-8606
DOI:10.1109/ISSCC.2003.1234351