Monitoring the formation of oxide apertures in micropillar cavities

An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small...

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Bibliographic Details
Published inCLEO: 2013 pp. 1 - 2
Main Authors Bakker, Morten P., Snijders, Henk, Suntrup, Donald J., Truong, Tuan-Ahn, Petroff, Pierre M., van Exter, Martin P., Bouwmeester, Dirk
Format Conference Proceeding
LanguageEnglish
Published The Optical Society 01.06.2013
Subjects
Cavity resonators
Optical device fabrication
Optical reflection
Optical refraction
Optical variables control
Oxidation
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Summary:An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small volume have been formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxide apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step.
ISSN:2160-8989
2160-9004