A self-resonant MEMS-based electrostatic field sensor

An electric-field sensor is presented for applications such as xerography. The sensor combines a vibrating MEMS structure with synchronous-detection electronics. The sensor architecture has three major blocks: a MEMS shutter, a sense interface, and a self-resonant drive loop that feeds back to the M...

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Bibliographic Details
Published in2006 American Control Conference p. 6 pp.
Main Authors Lundberg, K.H., Shafran, J.S., Kuang, J., Judy, M., Denison, T.A.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2006
Subjects
Circuits
Electric variables measurement
Electrodes
Electrophotography
Electrostatics
Feedback loop
Geophysical measurements
Micromechanical devices
Monitoring
Semiconductor device noise
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Summary:An electric-field sensor is presented for applications such as xerography. The sensor combines a vibrating MEMS structure with synchronous-detection electronics. The sensor architecture has three major blocks: a MEMS shutter, a sense interface, and a self-resonant drive loop that feeds back to the MEMS shutter. The self-resonant feedback loop is the enabling technology that provides the improved performance reported here. Prototyped in the iMEMS3 process at Analog Devices, the noise floor is 4.0 V/m/radic(Hz) and the integral nonlinearity is 20 V/m over a range of plusmn700 kV/m, which is an order-of-magnitude improvement over existing MEMS devices
ISBN:9781424402090
1424402093
ISSN:0743-1619
2378-5861
DOI:10.1109/ACC.2006.1656384