Microfabricated probes for near-field optical microscopy

Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with integrated quartz tips allowing near-field optical imaging of single fluorophores with 32 nm lateral resolution...

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Bibliographic Details
Published in2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) pp. 127 - 128
Main Authors Heinzelmann, H., Eckert, R., Freyland, J.M., Gersen, H., Schurmann, G., Noell, W., Staufer, U., De Rooij, N.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2000
Subjects
Apertures
Fluorescence
Light sources
Optical films
Optical imaging
Optical microscopy
Optical scattering
Optical sensors
Probes
Silicon
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Summary:Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with integrated quartz tips allowing near-field optical imaging of single fluorophores with 32 nm lateral resolution.
ISBN:9780780362574
0780362578
DOI:10.1109/OMEMS.2000.879658