Application of flat image recognition technique for automation of micro device production

The main idea of the suggested method is to use machine vision systems for micro devices production. It is proposed to reduce the three-dimensional machine vision tasks to two-dimensional (flat) tasks of optical recognition. Contour processing algorithms (for example, thinning, thickening etc.) are...

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Bibliographic Details
Published in2001 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Proceedings (Cat. No.01TH8556) Vol. 1; pp. 488 - 493 vol.1
Main Author Baidyk, T.N.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2001
Subjects
Assembly
Automation
Image recognition
Instruments
Layout
Lithography
Machine tools
Machine vision
Production facilities
Shape
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Summary:The main idea of the suggested method is to use machine vision systems for micro devices production. It is proposed to reduce the three-dimensional machine vision tasks to two-dimensional (flat) tasks of optical recognition. Contour processing algorithms (for example, thinning, thickening etc.) are developed and neural classifiers are used to solve the recognition tasks.
ISBN:0780367367
9780780367364
DOI:10.1109/AIM.2001.936511