A novel two axis actuator for high speed large angular rotation

Reports the development of a novel two axis rotary actuator capable of high frequency out-of-plane rotation in two fully independent axes with large angular excursions. Initial results indicate that using the novel suspension and actuation mechanism presented permits large rotations exceeding /spl p...

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Bibliographic Details
Published inProceedings of International Solid State Sensors and Actuators Conference (Transducers '97) Vol. 1; pp. 327 - 330 vol.1
Main Authors Dhuler, V.R., Walters, M., Mahadevan, R., Cowen, A.B., Markus, K.W.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1997
Subjects
Boron
Control systems
Electrodes
Electrostatic actuators
Motion control
Optical control
Optical sensors
Pneumatic actuators
Silicon
Voltage
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Summary:Reports the development of a novel two axis rotary actuator capable of high frequency out-of-plane rotation in two fully independent axes with large angular excursions. Initial results indicate that using the novel suspension and actuation mechanism presented permits large rotations exceeding /spl plusmn/13.5 degrees at rotational speeds exceeding 15 kHz, using excitation voltages below 100 V. The device is fabricated using a combination of surface and bulk micromachining. In this work the actuators are used to rotate single crystal silicon plates of sizes up to 1 mm/sup 2/. The size of such a device is less than 4 mm/sup 2/ making it suitable for a variety of new applications, such as micropositioning systems, inertial systems, microoptical elements, and compact imaging systems.
ISBN:9780780338296
0780338294
DOI:10.1109/SENSOR.1997.613650