Very short TAT ULSI trial manufacturing line construction

The LSI manufacturing division manufactures leading-edge trial products to support the semiconductor business of NEC. As LSI design rules are rapidly becoming finer, short turn-around time (TAT) is becoming an important subject in order to create new products as quickly as possible. Under these circ...

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Bibliographic Details
Published inIEEE International Symposium on Semiconductor Manufacturing, 1997 pp. P19 - P22
Main Authors Kato, S., Suzuki, T., Yamazaki, K., Nakamura, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 1997
Subjects
Customer satisfaction
Humans
Large scale integration
Lead compounds
Manufacturing
National electric code
Personnel
Semiconductor device manufacture
Total quality management
Ultra large scale integration
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Summary:The LSI manufacturing division manufactures leading-edge trial products to support the semiconductor business of NEC. As LSI design rules are rapidly becoming finer, short turn-around time (TAT) is becoming an important subject in order to create new products as quickly as possible. Under these circumstances, we established a system of improvement based on total productive maintenance (TPM) to achieve 100% customer satisfaction, with priority on very short TAT and success on the first run.
ISBN:0780337522
9780780337527
DOI:10.1109/ISSM.1997.664610