Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers

The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by tw...

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Bibliographic Details
Published in2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) pp. 1 - 5
Main Authors Possas, Maira, Rousseau, Lionel, Ghassemi, Farbod, Lissorgues, Gaelle, Scorsone, Emmanuel, Bergonzo, Philippe
Format Conference Proceeding
LanguageEnglish
Published Circuits Multi Projets - CMP 01.04.2014
Subjects
Diamonds
Fabrication
Force
Materials
Microcantilevers
Micromechanical devices
Micromechanical test
Polycrystalline Diamond
Resonant frequency
Surface Profilometer
Young's modulus
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Summary:The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young's Modulus mean value of polycrystalline diamond cantilever was estimated from these tests at 950-1100GPa.
ISBN:9782355000287
235500028X
DOI:10.1109/DTIP.2014.7056658