High Performance and Low Energy Consumption in Phase Change Material RF Switches

This paper presents a RF to mm-wave switch based on Germanium Telluride phase change material. An integration process compatible with a standard CMOS back end of line is proposed to realize directly heated switches. RF measurements, performed up to 65 GHz, show an ON-state resistance of \mathbf{1}\O...

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Bibliographic Details
Published in2018 48th European Microwave Conference (EuMC) pp. 491 - 494
Main Authors Leon, Alexandre, Reig, Bruno, Puyal, Vincent, Perret, Etienne, Ferrari, Philippe, Podevin, Florence
Format Conference Proceeding
LanguageEnglish
Published European Microwave Association 01.09.2018
Subjects
Crystallization
direct heating
Energy consumption
GeTe
Heating systems
Phase change materials
phase-change material
Radio frequency
Resistance
RF switches
Switches
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Summary:This paper presents a RF to mm-wave switch based on Germanium Telluride phase change material. An integration process compatible with a standard CMOS back end of line is proposed to realize directly heated switches. RF measurements, performed up to 65 GHz, show an ON-state resistance of \mathbf{1}\Omega with an OFF-state capacitance of 7 fF corresponding to a 22 THz cutoff frequency which constitutes a state-of-the-art Figure-of-Merit. Switching time of only 60 ns in both phase changes allow energy consumption one decade lower than the state-of-the-art for crystallization. A geometrical variation of GeTe dimensions shows a linear evolution of RF performance in terms of ON-state resistance and an almost unchanged performance in the OFF-state.
DOI:10.23919/EuMC.2018.8541622