Semantic modeling for smart manufacturing: towards a data alignment through knowledge formalization for semiconductor wafer fabrication

This paper describes a new approach for the data alignment in the front-end part of semiconductor manufacturing, i.e., wafer fabrication. The approach is based on semantic modeling techniques and focuses on the formalization of engineering knowledge through the creation of a network of ontologies fo...

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Bibliographic Details
Published in2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) pp. 1 - 6
Main Authors Maslov, Giulia, Yugma, Claude, Vialletelle, Philippe
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2023
Subjects
Data models
Fabrication
Industry 4.0
Knowledge engineering
Knowledge formalization
Ontologies
Ontology Development
Semantic modeling
Semantics
Semiconductor device manufacture
Semiconductor device modeling
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Summary:This paper describes a new approach for the data alignment in the front-end part of semiconductor manufacturing, i.e., wafer fabrication. The approach is based on semantic modeling techniques and focuses on the formalization of engineering knowledge through the creation of a network of ontologies for the modelling of wafer fab equipment. A methodology for the creation of such a model is presented as well as an example for the verification of its consistency through a practical use case for STMicroelectronics Crolles 300mm fab
ISSN:2376-6697
DOI:10.1109/ASMC57536.2023.10121118