Harvesting mechanical energy by means of MEMS-based electrostrictive microgenerators

• Published in: 2019 IEEE Radio and Antenna Days of the Indian Ocean (RADIO) pp. 1 - 2
• Main Authors: Nesser, H., Debeda, H., Yuan, J., Colin, A., Poulin, P., Dufour, I., Ayela, C.
• Format: Conference Proceeding
• Language: English
• Published: Radio Society 01.09.2019
• DOI: 10.23919/RADIO46463.2019.8968880

Recent advances in the field of microelectromechanical systems (MEMS) have generated great interest in the substitution of inorganic microcantilevers by organic ones, due to their low cost, high flexibility and a simplified fabrication by means of printing methods. Here, we present the integration of electrostrictive nanocomposites into organic microcantilever resonators specifically designed for mechanical energy harvesting from ambient vibrations. Strain sensitive nanocomposite materials composed of reduced graphene oxide (rGO) dispersed in polydimethylsiloxane (PDMS) are integrated into all-organic MEMS by means of an innovative low-cost and environment friendly process by combining printing techniques and xurography. The fabricated microcantilevers are promising candidates for mechanical energy harvesting as at their first resonant mode (15 Hz), they generate an electrical power density of 6 μW/cm 3 .