Tip-matter interaction measurements using mems ring resonators

We have previously reported on a new concept of atomic force microscope (AFM) probes using bulk-mode silicon resonators. We report here measurements of interaction between a surface and the vibrating tip of the resonator. In particular, the tip oscillation amplitude versus the probe-sample distance...

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Bibliographic Details
Published inTRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 1638 - 1641
Main Authors Algre, E., Legrand, B., Faucher, M., Walter, B., Buchaillot1, L.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2009
Subjects
AFM
Atomic force microscopy
Etching
Fabrication
Force measurement
MEMS
Micromechanical devices
Optical ring resonators
Probes
Resonance
Resonant frequency
Ring silicon resonators
Silicon
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Summary:We have previously reported on a new concept of atomic force microscope (AFM) probes using bulk-mode silicon resonators. We report here measurements of interaction between a surface and the vibrating tip of the resonator. In particular, the tip oscillation amplitude versus the probe-sample distance has been acquired for various surface materials. These experiments give access to the electrical response of the resonator regarding the tip-surface interaction and represent a first step towards force spectroscopy using MEMS resonators based probes. This work paves the way to the integration of such probes in an AFM set-up using the resonator output signal as the AFM feedback control signal.
ISBN:1424441900
9781424441907
ISSN:2159-547X
DOI:10.1109/SENSOR.2009.5285774