Damage creation in silicon single crystals irradiated with 200 keV/atom Au$+_n$ clusters

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Bibliographic Details
Published inNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 164-165; pp. 396 - 400
Main Authors Canut, B., Fallavier, M., Marty, O., Ramos, S.M.M.
Format Conference Proceeding
LanguageEnglish
Published Elsevier 01.04.2000
Subjects
Instrumentation and Detectors
Physics
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ISSN:1872-9584
0168-583X
DOI:10.1016/S0168-583X(99)01119-2