OPTICAL CHARACTERISTICS OF THIN FILMS OF [In.sub.2][O.sub.3] AND ITO

The results of ellipsometric investigations of thin films of [In.sub.2][O.sub.3] and [In.sub.2][O.sub.3]:Sn (90:10%) (ITO) and spectral measurements of the optical transmission are presented. The [In.sub.2][O.sub.3] films were obtained by sputtering on [Al.sub.2][O.sub.3] [012] substrates with the u...

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Bibliographic Details
Published inJournal of applied spectroscopy Vol. 83; no. 3; pp. 478 - 480
Main Authors Tikhii, A.A, Nikolaenko, Yu.M, Zhikhareva, Yu.I, Zhikharev, I.V
Format Journal Article
LanguageEnglish
Published Springer 01.07.2016
Subjects
Electrical conductivity
Indium
Optical properties
Thin films
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Summary:The results of ellipsometric investigations of thin films of [In.sub.2][O.sub.3] and [In.sub.2][O.sub.3]:Sn (90:10%) (ITO) and spectral measurements of the optical transmission are presented. The [In.sub.2][O.sub.3] films were obtained by sputtering on [Al.sub.2][O.sub.3] [012] substrates with the use of improved magnetron equipment VUP-5M. The ITO films on CEC015S glass substrates were manufactured by PG&O. The thicknesses, refractive indices, and forbidden band gaps of the materials were determined. The obtained values agree with previously described results, indicating that the investigated films are of good quality.
ISSN:0021-9037
1573-8647
DOI:10.1007/s10812-016-0314-1