Subfab sync increases energy savings

Integrated subfab component systems synchronized to process tools can offer IC manufacturers significant cost savings and carbon reduction of >20% compared to current baselines with discrete components and mechanical switch interface. Consolidating multiple discrete subfab components and connecti...

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Bibliographic Details
Published inSolid state technology Vol. 53; no. 4; p. 12
Main Authors Chandler, Phil, Neuber, Andreas, Fisher, Paul
Format Magazine Article
LanguageEnglish
Published Tulsa PennWell Publishing Corp 01.04.2010
PennWell Corporation
Subjects
Cost control
Energy consumption
Energy efficiency
Energy use
Integrated circuit fabrication
Integration
Methods
Production processes
Safety standards
Semiconductor wafers
Semiconductors
Silicon wafers
United States
United States > US
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Summary:Integrated subfab component systems synchronized to process tools can offer IC manufacturers significant cost savings and carbon reduction of >20% compared to current baselines with discrete components and mechanical switch interface. Consolidating multiple discrete subfab components and connections into a single integrated unit requires system engineering to a single cluster controller to sense tool loading.
Bibliography:content type line 24
ObjectType-Front Page/Cover Story-1
SourceType-Magazines-1
ISSN:0038-111X