Pulsed plasma chemical synthesis of SixCyOz composite nanopowder

SixCyOz composite nanopowder with an average size of particles about 10-50 nm was produced using the pulsed plasma chemical method. The experiments on the synthesis of nanosized composite were carried out using a TEA-500 pulsed electron accelerator. To produce a composite, SiCl4, O2, and CH4 were us...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 830; no. 1
Main Authors Kholodnaya, G, Sazonov, R, Ponomarev, D, Remnev, G
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 04.05.2017
Subjects
Chemical reactions
Chemical reactors
Chemical synthesis
Electron beams
Electrons
Infrared absorption
Infrared analysis
Morphology
Physics
Reagents
Silicon tetrachloride
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Summary:SixCyOz composite nanopowder with an average size of particles about 10-50 nm was produced using the pulsed plasma chemical method. The experiments on the synthesis of nanosized composite were carried out using a TEA-500 pulsed electron accelerator. To produce a composite, SiCl4, O2, and CH4 were used. The major part of experiments was conducted using a plasma chemical reactor (quartz, 140 mm diameter, 6 l volume). The initial reagents were injected into the reactor, then a pulsed electron beam was injected which initiated the chemical reactions whose products were the SixCyOz composite nanopowder. To define the morphology of the particles, the JEOL-II-100 transmission electron microscope (TEM) with an accelerating voltage of 100 kV was used. The substances in the composition of the composite nanopowder were identified using the infrared absorption optical spectrum. To conduct this analysis, the Nicolet 5700 FT-IR spectrometer was used.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/830/1/012035