Measuring line edge roughness: fluctuations in uncertainty
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Published in | Microlithography world Vol. 17; no. 3; p. 10 |
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Main Author | |
Format | Magazine Article |
Language | English |
Published |
PennWell Publishing Corp
01.08.2008
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Subjects | |
Online Access | Get full text |
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ISSN: | 1074-407X |
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