Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

• Published in: Microelectronic engineering Vol. 177; pp. 46 - 51
• Main Authors: Berthod, L., Shavdina, O., Vocanson, F., Langlet, M., Dellea, O., Veillas, C., Reynaud, S., Verrier, I., Jourlin, Y.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 05.06.2017; Elsevier
• Subjects: Chemical Sciences; Engineering Sciences; Grating; Material chemistry; Micro and nanotechnologies; Micro-structuring; Microelectronics; Nano-spheres lithography; Nanopillars; Optics; Photonic; Sol-gel; TiO2; Nanopillars; Nano-spheres lithography; Grating; Micro-structuring; Sol-gel; TiO2
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2017.01.037

The authors demonstrate a low cost direct process to print directly TiO2 grating on both planar and non-conventional substrate such as cylinders. A well collimated i-line source emitting at 365nm wavelength illuminates a mono layer of 1μm diameter silica microspheres deposited on a photosensitive TiO2-based sol-gel layer. No etching process is required since this layer is directly UV photo patternable like a negative photo-resist. Furthermore this thin layer offers interesting optical properties (high refractive index) and good mechanical and chemical stability. The paper describes the photochemistry of the TiO2 sol-gel layer process, the modeling of the electric field distribution below the spheres during the illumination process and preliminary results of TiO2 nanopillars of 200nm diameter on the wall of a 5cm diameter cylinder. [Display omitted]