Modeling and Design of Higher Order, Multi-Mode, Multi-Port MEMS Resonators in 90Nm CMOS

This work presents various RF mixer-filter MEMS resonators implemented directly in CMOS. Three different composite resonator designs have been made in a 90nm CMOS process. These resonators move laterally in two different modes made possible by the flexible internal routing and stimulation of the mul...

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Bibliographic Details
Published inProcedia engineering Vol. 25; pp. 1521 - 1524
Main Authors Ramstad, J.E., Soeraasen, O.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 2011
Subjects
CMOS-MEMS
flexural
higher order
mixer-filter
multi-mode
multi-port
Resonator
multi-mode
Resonator
flexural
higher order
mixer-filter
multi-port
CMOS-MEMS
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Summary:This work presents various RF mixer-filter MEMS resonators implemented directly in CMOS. Three different composite resonator designs have been made in a 90nm CMOS process. These resonators move laterally in two different modes made possible by the flexible internal routing and stimulation of the multi-port creating these second mode mixer-filter capabilities. By utilizing post-processed self-assembly electrodes, narrow gaps between the electrodes and the resonator is achieved for increased electrostatic coupling. Based on three different resonator designs, 4th order filters are implemented by using a coupling beam connecting pairs of resonators. The higher order mechanical filters are driven differentially.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2011.12.376