Parameterization of the optical functions of a-Si1−xCx:H: applications to C depth-profiling and surface temperature monitoring in solar cell preparation

We have fitted the dielectric functions of hydrogenated amorphous silicon–carbon alloy (a-Si1−xCx:H) films to a Kramers–Kronig consistent analytical expression. The best-fit photon energy-independent parameters in this expression have been determined as polynomial functions of the carbon content, x...

Full description

Saved in:
Bibliographic Details
Published inJournal of non-crystalline solids Vol. 227-230; pp. 460 - 464
Main Authors Fujiwara, H, Koh, Joohyun, Wronski, C.R, Collins, R.W, Burnham, J.S
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.05.1998
Subjects
a-Si1−xCx:H
Dielectric function
Solar cell structure
Spectroscopic ellipsometry
S199
Dielectric function
Spectroscopic ellipsometry
a-Si1−xCx:H
O110
Solar cell structure
Online AccessGet full text

Cover

More Information
Summary:We have fitted the dielectric functions of hydrogenated amorphous silicon–carbon alloy (a-Si1−xCx:H) films to a Kramers–Kronig consistent analytical expression. The best-fit photon energy-independent parameters in this expression have been determined as polynomial functions of the carbon content, x (0≤x≤0.23), and measurement temperature, T (50≤T≤200°C). Such databases increase the analytical power of real time spectroscopic ellipsometry for determining x and T with high precision (δx∼±0.01 and δT=±2°C) in studies of a-Si1−xCx:H preparation and processing in solar cell structures.
ISSN:0022-3093
1873-4812
DOI:10.1016/S0022-3093(98)00089-1